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“SPAD ToF array for high-performance non-contact vibration sensing,” T. T. Lin, T. H. Sang, C. M. Tsai, G. Lin, S. D. Lin*, accepted by IEDM 2025, USA (September 2025).
Abstract— Non-contact vibration sensing is demonstrated with the time-of-flight (ToF) ranging by using a low-jitter CMOS single-photon avalanche diode (SPAD) array and an ultra-short-pulsed laser. The scheme deploying multiple SPADs enhances the sampling rate without compromising the ranging precision and enables the vibration sensing at a distance. As a result, successful measurement of vibration up to 500 Hz with sub-millimeter precision is achieved. This work presents an unprecedented way for vibration sensing and shows the potential of SPAD-ToF ranger for cost-effective and accurate long-distance sensing of vibration.